What should I use to clean the MAF sensor and how should it be done? It looks to sensitive to use the wrong stuff.

 

I usually just blow it or carefully wipe it off. You could also spray it with some electrical parts cleaner.

 

Here at the dealership we use electrical spray cleaner with a pipe cleaner followed by gently compressed air...

 

Carb cleaner works good too. If you are actually going to wipe it with something, be very careful. The wires are very thin and if you break one, then you will have to buy a new unit. I usually just spray mine with brake and parts cleaner( It doesn't leave a film) and they work fine.
Jimmy