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I usually use Gumout or any cheap carb cleaner. Spray in every orifice and don't skimp.
Carb Cleaner? The MAF on my truck is an electical sensor. I don't want any residue on it.
Electronics cleaner, RadioShack Tuner cleaner, CDC (?) MAF cleaner at the autoparts store .... anything meant for electronics --- zero residue, high volitivity (sp).
Carefully open it up to get to the two exposed wires (I believe the amount of amps, mA actually, used across the two wires is how mine works) and clean them very carefully.
I was once told that when the engine is first started, a high voltage spike is sent through the sensor to burn away contaiminants on the exposed wire. I don't know if this true.
After spraying wipe the wires very carefully with a q-tip. Make sure the rubber grommet is seated correctly. There is a link in the V-10 forum dealing with the grommet.